US 12,392,554 B2
Apparatus for processing a substrate and method of operating the same
Min Jin Jung, Hwaseong-si (KR); Tae Hwan Kim, Yongin-si (KR); Min Woong Kang, Hwaseong-si (KR); Hyun Jun Yoo, Seoul (KR); Sung Ho Kang, Yongin-si (KR); Song Hwan Park, Yongin-si (KR); Bo Sun Kim, Yongin-si (KR); Hong Won Lee, Yongin-si (KR); Joo Hyun Cho, Yongin-si (KR); and Yong Tak Jin, Yongin-si (KR)
Assigned to SK hynix Inc., Icheon-si (KR); and EUGENE TECHNOLOGY CO., LTD., Yongin-si (KR)
Filed by SK hynix Inc., Icheon-si (KR); and EUGENE TECHNOLOGY CO., LTD., Yongin-si (KR)
Filed on Nov. 18, 2022, as Appl. No. 17/990,481.
Application 17/990,481 is a continuation in part of application No. 16/700,921, filed on Dec. 2, 2019, abandoned.
Claims priority of application No. 10-2019-0071561 (KR), filed on Jun. 17, 2019.
Prior Publication US 2023/0082802 A1, Mar. 16, 2023
Int. Cl. F27B 5/16 (2006.01); F27B 5/06 (2006.01); F27B 5/14 (2006.01); F27B 5/18 (2006.01); F27B 17/00 (2006.01); H01L 21/67 (2006.01); H01L 21/673 (2006.01)
CPC F27B 5/16 (2013.01) [F27B 5/14 (2013.01); F27B 5/18 (2013.01); F27B 17/0025 (2013.01); F27B 2005/064 (2013.01); H01L 21/67248 (2013.01); H01L 21/67303 (2013.01)] 14 Claims
OG exemplary drawing
 
1. An apparatus for processing a substrate, the apparatus including an internal space divided into a plurality of sub-spaces in a vertical direction, the apparatus comprising:
a reaction tube arranged at the internal space, the reaction tube that processes a plurality of substrates stacked in the vertical direction;
a side cover arranged to surround the reaction tube, the side cover including a plurality of gas transmission holes arranged along the vertical direction at a selected portion of the side cover; and
a heater arranged between the reaction tube and the side cover, the heater including a plurality of unit heaters for each of the plurality of sub-spaces, the plurality of unit heaters separated by a is plurality of first holes,
wherein each of the unit heaters includes an adiabatic block for surrounding the reaction tube, the adiabatic block including a plurality of second holes radially formed therein and divided into a plurality of adiabatic regions; and a coil arranged on an inner surface of the adiabatic block,
wherein a cooling gas is transmitted through the plurality of first holes and the plurality of second holes, and temperature of the adiabatic block is lowered by the cooling gas flowing through the plurality of first and second holes.