US 12,392,486 B2
Optimising operating conditions in an abatement apparatus
Duncan Michael Price, Clevedon (GB); and Michael Colin Graham, Clevedon (GB)
Assigned to Edwards Limited, Burgess Hill (GB)
Appl. No. 17/773,745
Filed by Edwards Limited, Burgess Hill (GB)
PCT Filed Nov. 3, 2020, PCT No. PCT/GB2020/052779
§ 371(c)(1), (2) Date May 2, 2022,
PCT Pub. No. WO2021/089993, PCT Pub. Date May 14, 2021.
Claims priority of application No. 1916069 (GB), filed on Nov. 5, 2019.
Prior Publication US 2022/0373175 A1, Nov. 24, 2022
Int. Cl. F23G 7/06 (2006.01); C23C 16/44 (2006.01)
CPC F23G 7/065 (2013.01) [C23C 16/4412 (2013.01); F23G 2204/103 (2013.01); F23G 2207/104 (2013.01); F23G 2207/30 (2013.01); F23G 2209/142 (2013.01); F23G 2900/55003 (2013.01)] 4 Claims
OG exemplary drawing
 
1. A method of optimising operating conditions in an abatement apparatus configured to treat an effluent stream from a semiconductor processing tool, said method comprising:
measuring a concentration of carbon monoxide produced by said abatement apparatus when treating said effluent stream; and
adjusting an operating parameter of said abatement apparatus in response to said concentration of carbon monoxide, wherein adjusting the operating parameter comprises:
repeating steps of:
modifying a supply of oxidant, and
measuring the concentration of carbon monoxide in an exhaust of the abatement apparatus,
to arrive at a supply of oxidant at which an increase in the supply of oxidant causes an increase in the concentration of carbon monoxide and a decrease in the supply of oxidant causes an increase in the concentration of carbon monoxide.