US 12,392,427 B2
Insulated fluid lines in chemical mechanical polishing
Chad Pollard, San Jose, CA (US); Hari Soundararajan, Sunnyvale, CA (US); Paul D. Butterfield, San Jose, CA (US); Shou-Sung Chang, Mountain View, CA (US); Haosheng Wu, San Jose, CA (US); Calvin Lee, Oakland, CA (US); and Balasubramaniam Coimbatore Jaganathan, Bangalore (IN)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Feb. 24, 2022, as Appl. No. 17/680,163.
Claims priority of provisional application 63/156,864, filed on Mar. 4, 2021.
Prior Publication US 2022/0282807 A1, Sep. 8, 2022
Int. Cl. F16L 11/12 (2006.01); B24B 57/02 (2006.01); F16L 11/127 (2006.01)
CPC F16L 11/127 (2013.01) [B24B 57/02 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A chemical mechanical polishing assembly, comprising:
a chemical mechanical polishing system including a platen to support a polishing pad, a carrier head to support a substrate and bring the substrate into contact with the polishing pad, and a motor to cause relative motion between the platen and the carrier head;
a fluid source comprising a boiler, the boiler configured to generate steam from liquid water; and
a fluid delivery conduit to carry the steam from the fluid source into the chemical mechanical polishing system, the fluid delivery conduit having a first end and a second end, the fluid delivery conduit including
electrically insulative tubing configured to conduct the steam from the fluid source to the chemical mechanical polishing system,
a conductive wrapper wrapped around an outer diameter of the electrically insulative tubing from a first end of the electrically insulative tubing to a second end of the electrically insulative tubing, the conductive wrapper configured to flow an electrostatic discharge formed responsive to flowing the steam through the electrically insulative tubing,
a conductive wire attached to the conductive wrapper at the first end of the fluid delivery conduit, the conductive wire configured to flow the electrostatic discharge from the conductive wrapper to a grounding source, and
a heat shrink tubing surrounding the electrically insulative tubing and the conductive wrapper, wherein the heat shrink tubing extends along the electrically insulative tubing beyond the conductive wrapper, and wherein the conductive wire includes a portion extending between the electrically insulative tubing and the heat shrink tubing to an end sandwiched between an inner diameter of the conductive wrapper and an outer diameter of the electrically insulative tubing.