US 12,392,391 B2
Vibration isolator for supporting a payload
Galip Tuna Turkbey, Veldhoven (NL); Hubertus Renier Maria Van Lierop, Veldhoven (NL); Alexander Petrus Josephus Van Lankvelt, Veldhoven (NL); Erik Roelof Loopstra, Ederheim Huernheim (DE); and Ahmet Levent Avsar, Veldhoven (NL)
Assigned to CARL ZEISS SMT GMBH, Oberkochen (DE); and ASML NETHERLANDS B.V., Veldhoven (NL)
Filed by CARL ZEISS SMT GMBH, Oberkochen (DE); and ASML Netherlands B.V., Veldhoven (NL)
Filed on Sep. 16, 2022, as Appl. No. 17/947,016.
Claims priority of application No. 21197474 (EP), filed on Sep. 17, 2021.
Prior Publication US 2023/0085971 A1, Mar. 23, 2023
Int. Cl. F16F 15/023 (2006.01); F16F 9/04 (2006.01); F16F 9/05 (2006.01)
CPC F16F 15/0232 (2013.01) [F16F 9/0436 (2013.01); F16F 9/05 (2013.01); F16F 9/0454 (2013.01); F16F 2224/046 (2013.01)] 16 Claims
OG exemplary drawing
 
1. Vibration isolator for supporting a payload and isolating the payload from vibrations, comprising:
a pressurized gas compartment formed with a rigid base structure, which base structure has an opening covered with a flexible membrane having an inner surface facing towards the gas compartment and an outer surface facing in a direction facing away from the gas compartment,
a support member configured to support the payload, which support member is arranged in contact with the outer surface of the membrane, and
a clamping member arranged at the inner surface of the membrane, wherein the support member and the clamping member form a clamping system, which system comprises at least one magnetic element effecting a magnetic force pressing the membrane against the support member.