| CPC F16F 15/002 (2013.01) [F16F 15/02 (2013.01); F16M 5/00 (2013.01); F16F 2230/0047 (2013.01); F16F 2230/18 (2013.01)] | 17 Claims |
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1. An apparatus for attenuating vibration of a support structure for supporting a movable module that is drivable to move on the support structure, the support structure being isolated from a base by a resilient vibration isolator, the apparatus comprising:
a force compensation system coupled to the support structure for applying one or more first vibration suppression forces on the support structure for at least partially canceling a reaction force exerted by the movable module when the movable module is driven to move on the support structure, wherein the force compensation system includes at least two actuators configured and operative to compensate for the reaction force caused by acceleration of the movable module in each of first and second linear motion directions on the support structure, the first and second linear motion directions being perpendicular to each other, each actuator being operative to apply a first vibration suppression force parallel to the first or second linear motion direction on the support structure, and
a sensing system attached to the support structure for measuring a vibration parameter of the support structure,
wherein the force compensation system is further configured to apply at least one second vibration suppression force on the support structure according to the measured vibration parameter for attenuating vibration of the support structure.
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