US 12,392,050 B2
Infrared transmissivity measurement method of quartz glass crucible
Ken Kitahara, Akita (JP); Masanori Fukui, Akita (JP); Hiroshi Kishi, Akita (JP); Tomokazu Katano, Tokyo (JP); and Eriko Kitahara, Akita (JP)
Assigned to SUMCO CORPORATION, Tokyo (JP)
Filed by SUMCO CORPORATION, Tokyo (JP)
Filed on Feb. 16, 2024, as Appl. No. 18/443,722.
Application 18/443,722 is a division of application No. 17/413,929, granted, now 11,939,695, previously published as PCT/JP2019/049120, filed on Dec. 16, 2019.
Claims priority of application No. 2018-244361 (JP), filed on Dec. 27, 2018; and application No. 2018-244362 (JP), filed on Dec. 27, 2018.
Prior Publication US 2024/0183062 A1, Jun. 6, 2024
Int. Cl. C30B 15/10 (2006.01); C03B 20/00 (2006.01); C03C 19/00 (2006.01); C30B 29/06 (2006.01); F27B 14/10 (2006.01); G01N 21/3563 (2014.01); G01N 33/38 (2006.01); C03B 19/09 (2006.01)
CPC C30B 15/10 (2013.01) [C03B 20/00 (2013.01); C03C 19/00 (2013.01); C30B 29/06 (2013.01); F27B 14/10 (2013.01); G01N 21/3563 (2013.01); G01N 33/386 (2013.01); C03B 19/095 (2013.01)] 5 Claims
OG exemplary drawing
 
1. An infrared transmissivity measurement method of a quartz glass crucible,
in which the quartz glass crucible includes
a transparent layer made of quartz glass that does not contain bubbles,
a bubble layer formed outside the transparent layer and made of quartz glass containing bubbles, and
a semi-molten layer formed outside the bubble layer and made of raw material silica powder solidified in a semi-molten state,
the infrared transmissivity measurement method comprising:
a step of processing an outer surface of the quartz glass crucible formed by the semi-molten layer to remove a part of the semi-molten layer to form at least one recess in the semi-molten layer as a semi-molten layer removed portion such that a surface roughness of the semi-molten layer removed portion is lower than a surface roughness of the outer surface, wherein the semi-molten layer removed portion is surrounded by the semi-molten layer; and
a step of measuring an infrared transmissivity of the quartz glass crucible based on infrared light passing through the semi-molten layer removed portion.