US 12,392,040 B2
Metal body having magnesium fluoride region formed therefrom
Carlo Waldfried, Middleton, MA (US); and Bryan C. Hendrix, Danbury, CT (US)
Assigned to ENTEGRIS, INC., Billerica, MA (US)
Filed by ENTEGRIS, INC., Billerica, MA (US)
Filed on Dec. 17, 2020, as Appl. No. 17/125,539.
Claims priority of provisional application 62/954,798, filed on Dec. 30, 2019.
Prior Publication US 2021/0198788 A1, Jul. 1, 2021
Int. Cl. C23C 8/06 (2006.01); C22C 21/08 (2006.01); C23C 22/02 (2006.01); C23C 22/73 (2006.01); C23C 22/56 (2006.01); C23C 22/57 (2006.01)
CPC C23C 22/02 (2013.01) [C22C 21/08 (2013.01); C23C 22/73 (2013.01)] 12 Claims
OG exemplary drawing
 
1. A method of forming a magnesium fluoride surface passivation region at a surface of a metal body comprising: separately adding a solid fluorinated polymer and a magnesium-containing metal body to a process chamber; heating the solid fluorinated polymer to generate a molecular fluorine source vapor; exposing the magnesium-containing metal body to the molecular fluorine source vapor at a temperature of at least 200 degrees Celsius for a period of time ranging from 1 to 15 hours, wherein fluorine from the molecular fluorine vapor source reacts with magnesium within the magnesium-containing metal body to form the magnesium fluoride surface passivation region at the surface of the metal body at a desired thickness.