US 12,392,028 B2
Laser activated luminescence system
Marcos Dantus, Okemos, MI (US); and Timothy A. Grotjohn, Okemos, MI (US)
Assigned to Board of Trustees of Michigan State University, East Lansing, MI (US)
Filed by Board of Trustees of Michigan State University, East Lansing, MI (US)
Filed on Oct. 26, 2022, as Appl. No. 17/973,610.
Application 17/973,610 is a continuation of application No. PCT/US2021/029149, filed on Apr. 26, 2021.
Claims priority of provisional application 63/016,573, filed on Apr. 28, 2020.
Prior Publication US 2023/0062860 A1, Mar. 2, 2023
Int. Cl. C23C 16/27 (2006.01); C01B 32/28 (2017.01); C23C 16/04 (2006.01); C23C 16/511 (2006.01); C23C 16/56 (2006.01); C30B 25/02 (2006.01); C30B 25/04 (2006.01); C30B 25/10 (2006.01); C30B 25/18 (2006.01); C30B 29/04 (2006.01); C30B 31/06 (2006.01); C30B 33/02 (2006.01); C30B 33/04 (2006.01); C30B 33/12 (2006.01); B82Y 20/00 (2011.01)
CPC C23C 16/278 (2013.01) [C01B 32/28 (2017.08); C23C 16/04 (2013.01); C23C 16/274 (2013.01); C23C 16/511 (2013.01); C23C 16/56 (2013.01); C30B 25/02 (2013.01); C30B 25/04 (2013.01); C30B 25/105 (2013.01); C30B 25/186 (2013.01); C30B 29/04 (2013.01); C30B 31/06 (2013.01); C30B 33/02 (2013.01); C30B 33/04 (2013.01); C30B 33/12 (2013.01); B82Y 20/00 (2013.01); C01P 2002/52 (2013.01)] 25 Claims
OG exemplary drawing
 
1. A method of manufacturing a diamond, the method comprising:
(a) epitaxially growing the diamond within a plasma assisted chemical vapor deposition reactor;
(b) etching the diamond to create a surface discontinuity located inwardly from a periphery of the diamond;
(c) forming color centers in the diamond in predetermined three-dimensional locations;
(d) emitting multiple ionization laser pulses, of different characteristics, to ionize the diamond;
(e) emitting at least one annealing laser pulse to anneal the diamond; and
(f) the locations of the color centers allowing communication between more than two of the color centers.