US 12,391,546 B1
Method of making acoustic devices with directional reinforcement
You Qian, Singapore (SG); Rakesh Kumar, Singapore (SG); Guofeng Chen, Fremont, CA (US); Myeong Gweon Gu, Seoul (KR); Myung Hyun Park, Seongnam-si (KR); Jae Hyung Lee, Seoul (KR); and Michael Jon Wurtz, Lake Oswego, OR (US)
Assigned to Skyworks Global Pte. Ltd., Singapore (SG)
Filed by Skyworks Global Pte. Ltd., Singapore (SG)
Filed on Jan. 6, 2022, as Appl. No. 17/647,224.
Claims priority of provisional application 63/134,755, filed on Jan. 7, 2021.
Claims priority of provisional application 63/134,746, filed on Jan. 7, 2021.
Int. Cl. B81C 1/00 (2006.01); H10N 30/06 (2023.01); H10N 30/084 (2023.01)
CPC B81C 1/0015 (2013.01) [H10N 30/06 (2023.02); H10N 30/084 (2023.02); B81B 2201/0257 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A method of making a piezoelectric sensor for a piezoelectric microelectromechanical systems microphone, comprising:
forming or providing a mold extending along a length and having two or more grooves in a top surface of the mold, the two or more grooves extending in a direction of the length of the mold to a distal end of the mold, the two or more grooves diverging from each other along their lengths;
forming or depositing a structure having one or more piezoelectric layers over the top surface of the mold to define a beam with a proximal portion and a distal portion, the distal portion having a corrugated section including two or more grooves that correspond to the two or more grooves of the mold;
forming an electrode or applying an electrode to the proximal portion of the structure; and
releasing the structure from the mold to form one or more cantilever beams.