US 12,391,544 B2
Hermetically sealed transparent cavity and package for same
Thomas Zetterer, Landshut (DE); Antti Määttänen, Tampere (SE); Jens Ulrich Thomas, Mainz (DE); Robert Hettler, Kumhausen (DE); and Yutaka Onezawa, Otsu (JP)
Assigned to Schott AG, Mainz (DE)
Filed by Schott AG, Mainz (DE)
Filed on Jul. 14, 2022, as Appl. No. 17/865,062.
Application 17/865,062 is a continuation of application No. PCT/EP2021/050825, filed on Jan. 15, 2021.
Claims priority of application No. 10 2020 100 819.8 (DE), filed on Jan. 15, 2020.
Prior Publication US 2022/0348457 A1, Nov. 3, 2022
Int. Cl. B81B 7/00 (2006.01); B81C 1/00 (2006.01)
CPC B81B 7/0058 (2013.01) [B81C 1/00333 (2013.01); B81C 2201/0146 (2013.01); B81C 2203/0118 (2013.01)] 8 Claims
OG exemplary drawing
 
1. A hermetically sealed package, comprising:
a base substrate;
a cover substrate, the base substrate and the cover substrate defining at least two parts respectively of the hermetically sealed package, the at least two parts of the hermetically sealed package being joined, at least indirectly, together by at least one laser bonding line to form the hermetically sealed package, the at least one laser bonding line forming a string of multiple laser pulse impact areas;
at least one functional area enclosed by the hermetically sealed package;
one of:
(a) the cover substrate integrally defining both a lateral circumferential edge of a cavity and an upper side of the cavity of the hermetically sealed package, and the base substrate being hermetically joined to the cover substrate by the at least one laser bonding line, such that the hermetically sealed package is formed by only two of the at least two parts, the hermetically sealed package further including at least one of a lateral circumferential rim and a plurality of rim faces having a flank including an upper segment and a lower segment which are angled relative to one another and to a plane normal to the base substrate, the cover substrate and not the base substrate defining the upper segment, the cover substrate in part and the base substrate in part defining the lower segment; and
(b) at least one of a lateral circumferential rim and a plurality of rim faces of the hermetically sealed package having a flank angle relative to a surface normal of the base substrate of between 10 and 45 degrees, between 15 and 30 degrees, or between 18 and 25 degrees relative to the surface normal of the base substrate, the hermetically sealed package further including an intermediate substrate, wherein at least one of the lateral circumferential rim and the plurality of rim faces of the hermetically sealed package having a flank including an upper segment and a lower segment which are angled relative to one another and to a plane normal to the base substrate, the cover substrate in part and the intermediate substrate in part defining the upper segment, the intermediate substrate in part and the base substrate in part defining the lower segment, the intermediate substrate including an upper part and a lower part, the upper segment and the lower segment of the flank being angled relative to one another so as to form the flank angle which includes a vertex, the upper segment being above the vertex and the lower segment being below the vertex such that the upper part of the intermediate substrate is above the vertex and the lower part of the intermediate substrate is below the vertex, the upper segment of the flank and the lower segment of the flank contacting each other at the vertex.