| CPC B81B 3/0021 (2013.01) [B81B 2201/033 (2013.01); B81B 2203/019 (2013.01); B81B 2203/0307 (2013.01); B81B 2203/033 (2013.01); B81B 2207/07 (2013.01)] | 9 Claims |
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1. A microelectromechanical device comprising:
an insulating substrate characterized by an upper surface defining a plane including a first actuator formed therein, said first actuator comprising:
a first electrode disposed on a stationary comb having a first plurality of spaced tines projecting from a first crossbeam; and
a second electrode including:
a moveable comb including a second plurality of spaced tines projecting from a second crossbeam in a direction, wherein said second plurality of spaced tines meshes with said first plurality of spaced tines in an interdigitated fashion; and
at least one biasing element coupled to said moveable comb,
wherein the stationary comb, the movable comb, and the at least one biasing element are formed below said plane,
wherein said second electrode is electrically decoupled from said first electrode by at least one segmented feature selected from the group consisting of: a trench, an undercut, an overhang, and a suspended element,
and wherein, in operation, a variable voltage is applied across said first electrode and said second electrode to induce displacement of said moveable comb parallel to said plane.
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