US 12,390,994 B2
System for controlled depositing of a fluid on a substrate
Alessandro Siria, Paris (FR); Antoine Nigues, Paris (FR); Laetitia Jubin, Paris (FR); and Lydéric Bocquet, Paris (FR)
Assigned to PARIS SCIENCES ET LETTRES PARIS, Paris (FR); Centre National de la Recherche Scientifique, Paris (FR); Sorbonne Université, Paris (FR); and UNIVERSITE DE PARIS, Paris (FR)
Appl. No. 17/415,595
Filed by PARIS SCIENCES ET LETTRES, Paris (FR); Centre National de la Recherche Scientifique, Paris (FR); Sorbonne Université, Paris (FR); and UNIVERSITÉ DE PARIS, Paris (FR)
PCT Filed Dec. 17, 2019, PCT No. PCT/FR2019/053129
§ 371(c)(1), (2) Date Jun. 17, 2021,
PCT Pub. No. WO2020/128310, PCT Pub. Date Jun. 25, 2020.
Claims priority of application No. 1873249 (FR), filed on Dec. 18, 2018.
Prior Publication US 2022/0063192 A1, Mar. 3, 2022
Int. Cl. B29C 64/209 (2017.01); B29C 64/255 (2017.01); B29C 64/393 (2017.01); B33Y 10/00 (2015.01); B33Y 30/00 (2015.01); B33Y 50/02 (2015.01)
CPC B29C 64/209 (2017.08) [B29C 64/255 (2017.08); B29C 64/393 (2017.08); B33Y 10/00 (2014.12); B33Y 30/00 (2014.12); B33Y 50/02 (2014.12)] 16 Claims
OG exemplary drawing
 
1. System for controlling deposition of a fluid on a substrate, said system comprising:
a nanoinjector comprising:
a reservoir intended to store said fluid,
a non-deformable protuberance having an ejection orifice for extraction of said fluid from said reservoir,
a mechanical resonator comprising a tuning fork fixed to said nanoinjector, said tuning fork being adapted to detect contact between said protuberance and said substrate,
a control means of said mechanical resonator connected to:
an excitation means of said mechanical resonator adapted to cause said mechanical resonator to oscillate at an oscillation frequency (fi) so that said protuberance oscillates between a low position in which said protuberance is in contact with said substrate and a high position in which said protuberance and said substrate are not in contact, to
a detector means adapted to detect said oscillation of said mechanical resonator, and to
a regulator means adapted to adjust said contact between said protuberance and said substrate by controlling said oscillation of said mechanical resonator, said regulator means being connected to a first displacement means for the regulation, adapted at least to movement toward one another or away from one another, along an axis z, said substrate of said nanoinjector; and
wherein the tuning fork has a ratio between the resonance frequency and the quality factor between 0.1 and 20 inclusive.