| CPC B25J 15/0052 (2013.01) [H01L 21/68707 (2013.01)] | 20 Claims |

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1. A blade interval adjusting device, comprising:
blades;
base parts to which the blades are fixed;
a guide mechanism configured to guide movement of the base parts in a direction in which the base parts are arranged side by side; and
a linkage mechanism configured to parallelly change intervals of the base parts according to angle changes of link members coupled to the base parts,
wherein an interval fine-adjustment mechanism is provided at each of coupling parts between the base parts and the link members, the interval fine-adjustment mechanism being configured to finely adjust positions of the base parts in the direction in which the base parts are arranged side by side, individually, wherein the interval fine-adjustment mechanism includes:
a displacement block configured to move in a direction intersecting with the direction in which the base parts are arranged side by side;
a drive part configured to move the displacement block;
a slide block configured to move the coupling parts between the base parts and the link members in association with movement of the displacement block; and
a fixing part configured to stop the movement of the displacement block,
wherein the base parts include a limiting slot configured to permit movement of the slide block in the direction in which the base parts are arranged side by side and limit the movement of the slide block in a direction perpendicular to the direction in which the base parts are arranged side by side.
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