US 12,390,842 B2
Supporting structure, apparatus for supporting substrate and facility for processing substrate
Jae Hun Jeong, Chungcheongnam-do (KR); Cheol Yong Shin, Chungcheongnam-do (KR); Wan Hee Jeong, Chungcheongnam-do (KR); and Do Youn Lim, Chungcheongnam-do (KR)
Assigned to SEMES C0., LTD., Chungcheongnam-do (KR)
Filed by SEMES CO., LTD., Chungcheongnam-do (KR)
Filed on Feb. 6, 2023, as Appl. No. 18/105,883.
Claims priority of application No. 10-2022-0049708 (KR), filed on Apr. 21, 2022.
Prior Publication US 2023/0338997 A1, Oct. 26, 2023
Int. Cl. B08B 11/02 (2006.01); B08B 3/02 (2006.01); B08B 3/08 (2006.01)
CPC B08B 11/02 (2013.01) [B08B 3/02 (2013.01); B08B 3/08 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A support structure, comprising:
a support plate supporting a substrate;
a lower cover covering a lower portion of the support plate;
a catching unit comprising a concave-convex structure having portions corresponding to each other so that the support plate and the lower cover are rotated and assembled with each other;
a locking unit configured to be locked in a state in which support plate and the lower cover are assembled,
wherein the locking unit includes:
an elastic member embedded in a lower groove of the support plate;
a locking bar disposed in the lower groove, and connected to the elastic member and be elastically supported so as to protrude downwardly from the lower groove; and
a locking hole portion formed in the lower cover to insert the locking bar.