Subclass	Subgroup	Patent
C23C	14/0641	12392022
	14/086	12392023
	14/325	12392024
	14/3414	12392025
	14/541	12392026
	16/274	12392027
	16/278	12392028
	16/34	12392029
	16/36	12392030
	16/4404	12392031
	16/4412	12392032
		12392033
	16/45529	12392034
	16/45544	12392035
	16/45561	12392036
	16/458	12392037
	16/505	12392038
	18/14	12392039
	22/02	12392040
	28/042	12392041