US 12,389,711 B2
Solar cell metal electrode and preparation method therefor, and mask
Lianggong Hou, Nanjing (CN)
Assigned to LONGI GREEN ENERGY TECHNOLOGY CO., LTD., Shaanxi (CN)
Appl. No. 17/918,001
Filed by LONGI GREEN ENERGY TECHNOLOGY CO., LTD., Shaanxi (CN)
PCT Filed Apr. 23, 2021, PCT No. PCT/CN2021/089331
§ 371(c)(1), (2) Date Oct. 10, 2022,
PCT Pub. No. WO2021/218817, PCT Pub. Date Nov. 4, 2021.
Claims priority of application No. 202010337111.7 (CN), filed on Apr. 26, 2020.
Prior Publication US 2023/0142082 A1, May 11, 2023
Int. Cl. H10F 77/20 (2025.01); C23C 14/04 (2006.01); C23C 14/14 (2006.01); H10F 71/00 (2025.01)
CPC H10F 77/211 (2025.01) [C23C 14/042 (2013.01); C23C 14/14 (2013.01); H10F 71/00 (2025.01)] 11 Claims
OG exemplary drawing
 
1. A preparing method for a metal electrode of a solar cell, comprising:
preparing a patterned mask by laser etching a polymer film according to a desired shape of an electrode, wherein the patterned mask has adhesive property;
moving the patterned mask onto a substrate and fixing the patterned mask to the substrate, and coating a metal film on the patterned mask by a physical vapor deposition method so as to grow a metal electrode or an electrode seed layer with the desired shape on the substrate; and
peeling off the patterned mask after the metal electrode or the electrode seed layer with the desired shape is grown on the substrate.