US 12,384,077 B2
Imprint apparatus, method of manufacturing article, planarized layer forming apparatus, information processing apparatus, and determination method
Sentaro Aihara, Utsunomiya (JP)
Assigned to CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed by CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed on Jan. 12, 2023, as Appl. No. 18/153,508.
Application 18/153,508 is a division of application No. 16/411,648, filed on May 14, 2019, granted, now 11,577,433.
Claims priority of application No. 2018-095633 (JP), filed on May 17, 2018.
Prior Publication US 2023/0166430 A1, Jun. 1, 2023
Int. Cl. B29C 41/34 (2006.01); B29C 71/00 (2006.01); H01L 21/027 (2006.01)
CPC B29C 41/34 (2013.01) [B29C 71/0009 (2013.01); H01L 21/027 (2013.01)] 7 Claims
OG exemplary drawing
 
1. An information processing apparatus, the apparatus comprising:
a processor configured to
obtain a geometric feature amount of a droplet of a material on a substrate, related to a spread of the droplet of the material on the substrate, based on an image of a first plurality of droplets of the material captured by an image capturing unit while the material and a template are in contact with each other to form the material in a forming condition,
obtain correspondence relationship data between forming conditions when the material and the template are in contact with each other to form the material and geometric feature amounts related to the spread of the droplet of the material on the substrate,
obtain, from the obtained correspondence relationship data between the forming conditions and the geometric feature amounts, a geometric feature amount corresponding to a set forming condition,
obtain a spread shape of an initial droplet of the material based on the obtained geometric feature amount corresponding to the set forming condition,
obtain spread shapes of a second plurality of droplets of the material based on the obtained geometric feature amount corresponding to the set forming condition, and
determine arrangement data of the material that indicates positions where the material is to be supplied on a substrate by adjusting positions of the spread shapes of the second plurality of droplets, based on an area of a polygon obtained by connecting centers of gravity of the obtained spread shapes of the second plurality of droplets of the material and a center of gravity of the spread shape of the initial droplet of the material, such that the spread shapes of the second plurality of droplets and the spread shape of the initial droplet contact with each other.