| CPC B01D 65/02 (2013.01) [B01D 61/146 (2022.08); B01D 61/20 (2013.01); B01D 61/22 (2013.01); C02F 1/444 (2013.01); F28F 19/02 (2013.01); G01N 15/06 (2013.01); B01D 2311/246 (2013.01); B01D 2313/221 (2022.08); B01D 2313/48 (2013.01); B01D 2313/903 (2022.08); B01D 2321/08 (2013.01); B01D 2321/40 (2013.01); C02F 2103/04 (2013.01); C02F 2209/105 (2013.01); C02F 2209/20 (2013.01); C02F 2209/40 (2013.01); C02F 2303/08 (2013.01); C02F 2303/16 (2013.01); G01N 2015/0662 (2013.01)] | 13 Claims |

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1. A method of conditioning a filter module comprising:
measuring a concentration of total organic carbon (TOC) in a source of ultrapure water; heating the source of ultrapure water to between about 170° F. and about 190° F. to produce heated water;
rinsing the filter module with the heated water at a first flow rate of between about 2 gpm and about 15 gpm for a first predetermined period of time sufficient to stabilize a concentration of TOC in water at an outlet of the filter module;
flushing the filter module with the source of ultrapure water having ambient temperature at a second flow rate of between about 2 gpm and about 40 gpm for a second predetermined period of time, the second flow rate being greater than the first flow rate; and
cycling between rinsing the filter module with the heated water and flushing the filter module with the source of ultrapure water at ambient temperature until the water at the outlet of the filter module has less than 100 counts per liter of particles having a particle size less than 14 nm.
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