US 12,382,628 B2
Semiconductor device and method for forming the same
Liang Chen, Wuhan (CN); and Wenshan Xu, Wuhan (CN)
Assigned to YANGTZE MEMORY TECHNOLOGIES CO., LTD., Wuhan (CN)
Filed by YANGTZE MEMORY TECHNOLOGIES CO., LTD., Wuhan (CN)
Filed on Nov. 24, 2021, as Appl. No. 17/534,939.
Application 17/534,939 is a continuation of application No. PCT/CN2021/127465, filed on Oct. 29, 2021.
Prior Publication US 2023/0134829 A1, May 4, 2023
Int. Cl. H10B 20/00 (2023.01); H01L 21/265 (2006.01); H10D 62/83 (2025.01); H10D 64/01 (2025.01); H10D 64/62 (2025.01)
CPC H10B 20/60 (2023.02) [H01L 21/26513 (2013.01); H10D 62/83 (2025.01); H10D 64/01 (2025.01); H10D 64/62 (2025.01)] 14 Claims
OG exemplary drawing
 
1. A semiconductor device, comprising:
a semiconductor substrate;
a doped region formed in the semiconductor substrate;
a first source/drain and a second source/drain formed in the doped region;
a first conductive pad formed on the first source/drain and a second conductive pad formed on the second source/drain;
a gate dielectric layer disposed over the semiconductor substrate and the doped region exposing the first conductive pad and the second conductive pad;
a gate formed on the gate dielectric layer;
an insulation layer formed over the gate, the gate dielectric layer, the first conductive pad, and the second conductive pad; and
a first contact formed in the insulation layer in electric contact with the first conductive pad and a second contact formed in the insulation layer in electric contact with the second conductive pad,
wherein a first entire area of the first conductive pad is fully within a second area of the first source/drain, and a third entire area of the second conductive pad is fully within a fourth area of the second source/drain, and
wherein the first conductive pad fully overlaps the first source/drain, and the second conductive pad fully overlaps the second source/drain.