US 12,382,227 B2
Capacitive MEMS microphone, microphone unit and electronic device
Quanbo Zou, Shandong (CN); Maoqiang Dang, Shandong (CN); and Dexin Wang, Shandong (CN)
Assigned to GoertekMicroelectronics Co. Ltd., Shandong (CN)
Appl. No. 18/010,907
Filed by GOERTEKMICROELECTRONICS CO., LTD., Shandong (CN)
PCT Filed Jun. 30, 2020, PCT No. PCT/CN2020/099425
§ 371(c)(1), (2) Date Dec. 16, 2022,
PCT Pub. No. WO2021/253499, PCT Pub. Date Dec. 23, 2021.
Claims priority of application No. 202010548789.X (CN), filed on Jun. 16, 2020.
Prior Publication US 2023/0353951 A1, Nov. 2, 2023
Int. Cl. H04R 19/04 (2006.01); H04R 1/04 (2006.01)
CPC H04R 19/04 (2013.01) [H04R 1/04 (2013.01); H04R 2201/003 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A capacitive MEMS microphone, comprising:
a back electrode plate;
a diaphragm; and
a spacer separating the back electrode plate from the diaphragm,
wherein in a state where no operating bias is applied, at least a portion of the diaphragm is pre-deviated in a direction away from the back electrode plate relative to a flat position, and
wherein a ratio of a first static effective displacement of the at least a portion of the diaphragm that is pre-deviated to a thickness of the diaphragm is greater than or equal to 0.2 and less than or equal to 3.