US 12,381,531 B2
Thin-film LiTaO3 SAW resonator on silicon substrate with reduced spurious modes
Matthias Knapp, Munich (DE); Manuel Sabbagh, Dorfen (DE); and Gholamreza Dadgar Javid, Munich (DE)
Assigned to RF360 Singapore Pte. Ltd., Republic Plaza (SG)
Appl. No. 17/597,468
Filed by RF360 SINGAPORE PTE. LTD., Republic Plaza (SG)
PCT Filed Jun. 25, 2020, PCT No. PCT/EP2020/067845
§ 371(c)(1), (2) Date Jan. 6, 2022,
PCT Pub. No. WO2021/008847, PCT Pub. Date Jan. 21, 2021.
Claims priority of application No. 10 2019 119 097.5 (DE), filed on Jul. 15, 2019.
Prior Publication US 2022/0173714 A1, Jun. 2, 2022
Int. Cl. H03H 9/02 (2006.01); H03H 9/145 (2006.01); H03H 9/25 (2006.01); H03H 9/64 (2006.01); H03H 9/72 (2006.01)
CPC H03H 9/02574 (2013.01) [H03H 9/02559 (2013.01); H03H 9/145 (2013.01); H03H 9/25 (2013.01); H03H 9/6483 (2013.01); H03H 9/725 (2013.01)] 11 Claims
OG exemplary drawing
 
1. A SAW resonator with reduced spurious modes, comprising
a carrier substrate,
an electrode structure above the carrier substrate,
a piezoelectric layer between the carrier substrate and the electrode structure, wherein
the carrier substrate has a crystal orientation with the Euler angles (−45°±10°; −54°=10°; 60°±30°),
the piezoelectric layer comprises LiTaO3 and has a crystal orientation with the Euler angles (0°; 56°±8°; 0°).