US 12,381,464 B2
Magnet assembly, coil assembly, planar motor, positioning device and lithographic apparatus
Gudrun Ghilaine Agnes De Gersem, Veldhoven (NL); Roger Franciscus Mattheus Maria Hamelinck, Breda (NL); and Jeroen Van Duivenbode, Veldhoven (NL)
Assigned to ASML Netherlands B.V., Veldhoven (NL)
Appl. No. 17/926,573
Filed by ASML Netherlands B.V., Veldhoven (NL)
PCT Filed Apr. 18, 2021, PCT No. PCT/EP2021/060007
§ 371(c)(1), (2) Date Nov. 18, 2022,
PCT Pub. No. WO2021/233615, PCT Pub. Date Nov. 25, 2021.
Claims priority of application No. 20175785 (EP), filed on May 20, 2020.
Prior Publication US 2023/0208269 A1, Jun. 29, 2023
Int. Cl. H02K 41/03 (2006.01); G03F 7/00 (2006.01); H01F 6/06 (2006.01)
CPC H02K 41/031 (2013.01) [G03F 7/70758 (2013.01); H01F 6/06 (2013.01); H02K 2201/18 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A magnet assembly comprising:
a first plurality of superconductive (SC) coils inside an outer circumference and configured in a planar pattern, wherein the outer circumference defines a smallest rectangle that encloses the first plurality of SC coils; and
a second plurality of SC coils configured along an outer boundary of the planar pattern and at least partly configured inside the outer circumference;
wherein a coil of the first plurality of SC coils has a first in-plane shape and a coil of the second plurality of SC coils has a second in-plane shape, different from the first in-plane shape.