US 12,381,369 B2
Acousto-optic system having phase-shifting reflector
James Brookhyser, Lake Oswego, OR (US); Jan Kleinert, Willsonville, OR (US); and Jered Richter, Beaverton, OR (US)
Assigned to ELECTRO SCIENTIFIC INDUSTRIES, INC., Beaverton, OR (US)
Filed by ELECTRO SCIENTIFIC INDUSTRIES, INC., Beaverton, OR (US)
Filed on May 31, 2023, as Appl. No. 18/326,463.
Application 18/326,463 is a division of application No. 16/636,605, granted, now 11,705,686, previously published as PCT/US2018/052018, filed on Sep. 20, 2018.
Claims priority of provisional application 62/562,047, filed on Sep. 22, 2017.
Prior Publication US 2023/0307883 A1, Sep. 28, 2023
Int. Cl. G02B 6/42 (2006.01); G02B 26/06 (2006.01); G02F 1/00 (2006.01); G02F 1/29 (2006.01); G02F 1/33 (2006.01); H01S 3/106 (2006.01); H01S 5/12 (2021.01); H01S 5/14 (2006.01)
CPC H01S 3/1068 (2013.01) [G02B 6/42 (2013.01); G02B 26/06 (2013.01); G02F 1/00 (2013.01); G02F 1/292 (2013.01); G02F 1/33 (2013.01); H01S 5/124 (2013.01); H01S 5/145 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A beam positioner, comprising:
a first acousto-optic deflector (AOD) operative to diffract laser light so as to deflect a beam path within a first one-dimensional scan field extending along a first axis of a two-dimensional scan field;
a phase retarder, a mirror and a second AOD arranged within the beam path along which the laser light is propagatable from the first AOD,
wherein the phase retarder and mirror are arranged between the first AOD and the second AOD, and
wherein the second AOD is operative to diffract the laser light so as to deflect the beam path within a second one-dimensional scan field extending along a second axis of the two-dimensional scan field.