US 12,381,109 B2
Hermetic tubular linear motor based wafer lift actuator
Alexander Sulyman, San Francisco, CA (US); Phillip Alfred Criminale, Liberty Hill, TX (US); and Cory Bowdach, San Jose, CA (US)
Assigned to APPLIED MATERIALS, INC., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Dec. 22, 2022, as Appl. No. 18/087,187.
Claims priority of provisional application 63/420,022, filed on Oct. 27, 2022.
Prior Publication US 2024/0145291 A1, May 2, 2024
Int. Cl. H01L 21/687 (2006.01); H01L 21/683 (2006.01); H02K 11/22 (2016.01); H02K 41/03 (2006.01)
CPC H01L 21/68742 (2013.01) [H01L 21/6833 (2013.01); H02K 11/22 (2016.01); H02K 41/031 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A system for linear motion comprising:
a processing chamber having a chamber body defining an interior space;
a linear motor coupled to the processing chamber, the linear motor comprising:
a housing disposed outside of the interior space and sealed to the chamber body, the housing having a cavity in fluid communication with the interior space;
a slider disposed at least partially in the cavity, the slider configured to slide relative to the housing in the cavity; and
at least one electromagnetic coil surrounding the housing;
a position measurement device coupled to the housing and configured to measure a position of the slider relative to the cavity; and
a controller configured to control power to the at least one electromagnetic coil based on the measured position.