US 12,381,108 B2
Pin lifting device having a temperature sensor
Adrian Eschenmoser, Grabs (CH); Michael Dür, Hohenweiler (AT); and Andreas Hofer, Widnau (CH)
Assigned to VAT HOLDING AG, Haag (CH)
Appl. No. 17/312,867
Filed by VAT Holding AG, Haag (CH)
PCT Filed Dec. 10, 2019, PCT No. PCT/EP2019/084516
§ 371(c)(1), (2) Date Jun. 10, 2021,
PCT Pub. No. WO2020/120510, PCT Pub. Date Jun. 18, 2020.
Claims priority of application No. 102018009630.1 (DE), filed on Dec. 11, 2018.
Prior Publication US 2022/0020629 A1, Jan. 20, 2022
Int. Cl. H01L 21/687 (2006.01); G01K 13/00 (2021.01)
CPC H01L 21/68742 (2013.01) [G01K 13/00 (2013.01)] 25 Claims
OG exemplary drawing
 
1. A pin lifting device configured for moving and positioning a substrate in a process atmosphere region provided by a vacuum process chamber, the pin lifting device comprising:
a support pin designed to contact and support the substrate;
a coupling part having a coupling designed to receive the support pin, and
a drive part having a drive unit configured to drive the coupling linearly along an adjustment axis from:
a lowered normal position, where the support pin is configured to provide a state substantially free of action with respect to its intended effect, to
an extended support position in which the support pin is configured to provide for receiving and/or providing the substrate,
and back,
wherein
the drive part or the coupling part has at least one temperature sensor, wherein the temperature sensor is designed and arranged in such a way that, by means of the temperature sensor, a measurement signal representing thermal information with reference to at least part of the pin lifting device can be generated.