US 12,381,105 B2
Coolant channel with internal fins for substrate processing pedestals
Feng Wang, Sunnyvale, CA (US); Alexander Matyushkin, San Jose, CA (US); Darrell Ehrlich, San Jose, CA (US); and Eric Samulon, Oakland, CA (US)
Assigned to LAM RESEARCH CORPORATION, Fremont, CA (US)
Appl. No. 17/799,897
Filed by LAM RESEARCH CORPORATION, Fremont, CA (US)
PCT Filed Feb. 18, 2021, PCT No. PCT/US2021/018445
§ 371(c)(1), (2) Date Aug. 15, 2022,
PCT Pub. No. WO2021/168027, PCT Pub. Date Aug. 26, 2021.
Claims priority of provisional application 62/978,899, filed on Feb. 20, 2020.
Prior Publication US 2023/0087913 A1, Mar. 23, 2023
Int. Cl. H01L 21/00 (2006.01); H01J 37/32 (2006.01); H01L 21/67 (2006.01); H01L 21/683 (2006.01)
CPC H01L 21/6833 (2013.01) [H01J 37/32724 (2013.01); H01L 21/67109 (2013.01)] 29 Claims
OG exemplary drawing
 
1. A baseplate for a substrate support in a substrate processing system, the baseplate comprising:
at least one coolant channel formed within the baseplate, wherein (i) the at least one coolant channel defines a volume within the baseplate configured to retain a coolant and (ii) the at least one coolant channel follows a path configured to distribute the coolant in the volume throughout the baseplate, and wherein the at least one coolant channel comprises a plurality of turns distributed radially across the baseplate, the plurality of turns comprising a first set of turns located in a radially outer zone of the baseplate and a second set of turns located in a radially inner zone of the baseplate; and
at least one fin provided within the at least one coolant channel, wherein the at least one fin extends from at least one of a top, a bottom, and a sidewall of the at least one coolant channel into the volume to increase a surface area of the at least one coolant channel;
wherein the at least one fin comprises a plurality of fins; and
wherein the first set of turns comprises a first set of fins of the plurality of fins having a fixed height, the second set of turns comprises a second set of fins of the plurality of fins, and a height of the second set of fins decreases from an outermost turn to an innermost turn of the second set of turns.