| CPC H01L 21/67745 (2013.01) [H01L 21/67173 (2013.01); H01L 21/67178 (2013.01); H01L 21/67196 (2013.01)] | 10 Claims |
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1. A substrate processing apparatus, comprising:
a loading/unloading block in which a substrate is loaded and unloaded;
a processing station provided on one of left and right sides of the loading/unloading block, and in which the substrate is transferred to and from the loading/unloading block;
a relay block provided on one of left and right sides of the processing station, and in which the substrate is transferred to and from the processing station;
a plurality of processing blocks provided side by side in a left-right direction to form the processing station, each of the plurality of processing blocks including at least one processing module that performs a process on the substrate and a main transfer mechanism that delivers the substrate to the at least one processing module; and
a plurality of bypass transfer mechanisms provided separately from the main transfer mechanism and provided respectively for the plurality of processing blocks arranged side by side in the left-right direction to transfer the substrate between left and right blocks,
wherein a plurality of bypass transfer paths, which are transfer paths for the substrate transferred by the plurality of bypass transfer mechanisms, have heights different from each other, and partially overlap each other in a plan view, and
wherein each of the plurality of bypass transfer mechanisms includes a base body provided in each of the plurality of processing blocks, a first moving body that moves in the left-right direction with respect to the base body, and a substrate support body that supports the substrate and moves in the left-right direction with respect to the first moving body.
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