US 12,381,041 B2
Electrical device comprising a capacitor wherein the dielectric comprises anodic porous oxide, and the corresponding manufacturing method
Larry Buffle, Grenoble (FR); Frédéric Voiron, Barraux (FR); Julien El Sabahy, Grenoble (FR); and Brigitte Soulier, Grenoble (FR)
Assigned to MURATA MANUFACTURING CO., LTD., Nagaokakyo (JP)
Filed by Murata Manufacturing Co., Ltd., Nagaokakyo (JP)
Filed on Apr. 7, 2023, as Appl. No. 18/297,057.
Application 18/297,057 is a continuation of application No. PCT/IB2021/060036, filed on Oct. 29, 2021.
Claims priority of application No. 20306307 (EP), filed on Oct. 30, 2020.
Prior Publication US 2023/0245834 A1, Aug. 3, 2023
Int. Cl. H01G 4/012 (2006.01); H01G 4/08 (2006.01); H01G 4/10 (2006.01); H01G 4/33 (2006.01); H10D 1/00 (2025.01); H10D 1/68 (2025.01)
CPC H01G 4/33 (2013.01) [H01G 4/012 (2013.01); H01G 4/10 (2013.01); H10D 1/042 (2025.01); H10D 1/714 (2025.01); H10D 1/716 (2025.01); H01G 4/085 (2013.01)] 13 Claims
OG exemplary drawing
 
1. An electrical device comprising a capacitor, comprising:
a substrate;
an anodic porous oxide region above the substrate having a top surface;
a first capacitor electrode region arranged in the anodic porous oxide region, extending in the anodic porous oxide region from its top surface, the first capacitor electrode region having a first wall perpendicular to the top surface; and
a second capacitor electrode region arranged in the anodic porous oxide region, extending in the anodic porous oxide region from its top surface, the second capacitor electrode region having a second wall perpendicular to the top surface and facing the first wall of the first capacitor electrode region,
the first wall of the first capacitor electrode region and the second wall of the second capacitor electrode region being separated by a dielectric portion comprising a part of the anodic porous oxide region so that a capacitor is formed by the first capacitor electrode region, the second capacitor electrode region, and the dielectric portion,
wherein the dielectric portion further comprises a filling material inside at least a group of pores of the part of the anodic porous oxide region comprised in the dielectric portion.