US 12,380,596 B2
Method and system for determining beam position
Jan Stopka, Brno (CZ); Bohuslav Sed'a, Brno (CZ); Radovan Vašina, Brno (CZ); and Radim Šejnoha, Brno (CZ)
Assigned to FEI Company, Hillsboro, OR (US)
Filed by FEI Company, Hillsboro, OR (US)
Filed on Dec. 23, 2021, as Appl. No. 17/561,554.
Prior Publication US 2023/0206489 A1, Jun. 29, 2023
Int. Cl. G06T 7/73 (2017.01); G06T 7/33 (2017.01); G06T 7/37 (2017.01)
CPC G06T 7/74 (2017.01) [G06T 7/337 (2017.01); G06T 7/37 (2017.01); G06T 2207/10061 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A method for determining beamlets' positions in a multi-beam system, comprising:
performing a first scan by scanning multiple beamlets over a first sample region;
acquiring multiple cell images of the first sample region, wherein each cell image is formed based on signals received responsive to irradiation from a corresponding beamlet of the multiple beamlets;
performing a second scan by scanning the multiple beamlets over a second sample region;
acquiring multiple cell images of the second sample region, wherein at least a part of an overlapped region between the first sample region and the second sample region is scanned by the same beamlet of the multiple beamlets during both the first scan and the second scan; and
determining a relative position between at least two beamlets of the multiple beamlets based on the cell images acquired using the same beamlet during the first scan and the second scan.