US 12,379,618 B2
Micro-machined thin film lithium niobate electro-optic devices
Cheng Wang, Cambridge, MA (US); Mian Zhang, Cambridge, MA (US); and Marko Loncar, Cambridge, MA (US)
Assigned to PRESIDENT AND FELLOWS OF HARVARD COLLEGE, Cambridge, MA (US)
Filed by President and Fellows of Harvard College, Cambridge, MA (US)
Filed on Jan. 30, 2023, as Appl. No. 18/103,209.
Application 18/103,209 is a continuation of application No. 16/324,898, granted, now 11,598,980, previously published as PCT/US2017/046560, filed on Aug. 11, 2017.
Claims priority of provisional application 62/374,226, filed on Aug. 12, 2016.
Prior Publication US 2023/0176404 A1, Jun. 8, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. G02F 1/00 (2006.01); G02F 1/035 (2006.01); G02F 1/225 (2006.01)
CPC G02F 1/035 (2013.01) [G02F 1/0018 (2013.01); G02F 1/225 (2013.01); G02F 2203/15 (2013.01)] 19 Claims
OG exemplary drawing
 
1. An electro-optic device comprising:
a substrate,
a lithium niobate optical waveguide, disposed on and in direct contact with, a first side of the substrate, and comprising:
a central ridge consisting essentially of undoped lithium niobate and two legs extending outwards from the central ridge along the first side of the substrate, and
a pair of electrodes disposed on the first side of the substrate and electrically coupled to the lithium niobate optical waveguide to form an electrical capacitor, wherein a voltage difference is applied between said pair of electrodes,
wherein each of the two legs of the lithium niobate optical waveguide extends from the central ridge to one of the pair of electrodes, and
wherein the central ridge has a width of less than 1 μm along at least a portion thereof in the optical waveguide.