US 12,379,511 B2
Radiation detector and method of manufacture thereof
Alfonso Gonzalez Taboada, Dättwil (CH); Pietro Zambon, Dättwil (CH); Michael Rissi, Dättwil (CH); Roger Schnyder, Dättwil (CH); Michal Bochenek, Dättwil (CH); and Arne Jensen, Dättwil (CH)
Assigned to DECTRIS AG, Baden-Dättwil (CH)
Appl. No. 17/998,732
Filed by DECTRIS AG, Baden-Dättwil (CH)
PCT Filed May 13, 2020, PCT No. PCT/EP2020/063360
§ 371(c)(1), (2) Date Nov. 14, 2022,
PCT Pub. No. WO2021/228386, PCT Pub. Date Nov. 18, 2021.
Prior Publication US 2023/0333267 A1, Oct. 19, 2023
Int. Cl. G01T 1/24 (2006.01); G01T 1/17 (2006.01); G01T 1/20 (2006.01); H01L 23/00 (2006.01); H01L 23/48 (2006.01); H10F 39/00 (2025.01); H10F 39/12 (2025.01); H10F 39/18 (2025.01)
CPC G01T 1/247 (2013.01) [G01T 1/17 (2013.01); G01T 1/20183 (2020.05); H01L 24/48 (2013.01); H10F 39/018 (2025.01); H10F 39/1898 (2025.01); H10F 39/809 (2025.01); H10F 39/811 (2025.01); H01L 24/16 (2013.01); H01L 2224/16145 (2013.01); H01L 2224/48227 (2013.01)] 20 Claims
OG exemplary drawing
 
1. Radiation detector for position-resolved detection of radiation, comprising
at least one sensor tile with sensor material sensitive to the radiation, the sensor tile defining a horizontal plane,
a set of pixels of electrically conducting material in contact with the sensor material,
at least one ASIC assigned to the at least one sensor tile with input contacts in electrical connection with the pixels, wherein at least one input contact is horizontally offset relative to a corresponding pixel,
a redistribution layer between the at least one sensor tile and the at least one ASIC, the redistribution layer comprising conductor tracks electrically connecting the input contacts with the corresponding pixels,
wherein at least one of the conductor tracks crosses at least one crossed pixel different from the corresponding pixel,
wherein the at least one crossed pixel has a void of the electrically conducting material corresponding to at least a portion of a projection of the crossing conductor track.