| CPC G01R 1/0735 (2013.01) [G01R 1/07328 (2013.01); G01R 3/00 (2013.01); G01R 31/2601 (2013.01); G01R 31/2889 (2013.01)] | 13 Claims |

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1. A probe card device, comprising:
a thin film substrate having opposite first and second surfaces;
a first circuit board disposed over the second surface of the thin film substrate to electrically connect to the thin film substrate; and
a plurality of probes disposed over the first surface of the thin film substrate, wherein the probes are not deformable, and the plurality of probes and the thin film substrate are integrally formed.
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