US 12,379,399 B2
Probe card device
Pei-liang Chiu, Hsinchu (TW)
Assigned to PRINCO CORP., Hsinchu (TW)
Filed by PRINCO CORP., Hsinchu (TW)
Filed on Dec. 25, 2019, as Appl. No. 16/726,852.
Claims priority of application No. 108139290 (TW), filed on Oct. 30, 2019.
Prior Publication US 2021/0132116 A1, May 6, 2021
Int. Cl. G01R 1/073 (2006.01); G01R 3/00 (2006.01); G01R 31/26 (2020.01); G01R 31/28 (2006.01)
CPC G01R 1/0735 (2013.01) [G01R 1/07328 (2013.01); G01R 3/00 (2013.01); G01R 31/2601 (2013.01); G01R 31/2889 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A probe card device, comprising:
a thin film substrate having opposite first and second surfaces;
a first circuit board disposed over the second surface of the thin film substrate to electrically connect to the thin film substrate; and
a plurality of probes disposed over the first surface of the thin film substrate, wherein the probes are not deformable, and the plurality of probes and the thin film substrate are integrally formed.