US 12,379,326 B2
Dark-field microscopy imaging apparatus
Mingzhao Liu, Syosset, NY (US); Justine E. Haupt, Mattituck, NY (US); Connie-Rose Mai Deane, Moriches, NY (US); and Oleg Gang, Setauket, NY (US)
Assigned to The Trustees of Columbia University in the City of New York, New York, NY (US); and United States Department of Energy, Washington, DC (US)
Filed by Brookhaven Science Associates, LLC, Upton, NY (US); and The Trustees of Columbia University in the City of New York, New York, NY (US)
Filed on May 16, 2022, as Appl. No. 17/745,506.
Claims priority of provisional application 63/189,665, filed on May 17, 2021.
Prior Publication US 2022/0365000 A1, Nov. 17, 2022
Int. Cl. G01N 21/95 (2006.01); G01N 21/88 (2006.01); G01N 21/956 (2006.01)
CPC G01N 21/9501 (2013.01) [G01N 21/8806 (2013.01); G01N 21/95684 (2013.01); G01N 2021/8822 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A dark-field microscopy imaging apparatus comprising:
a main body, the main body comprising an aperture, the aperture configured to receive a wafer, the wafer configured to receive a sample under study;
a circuit assembly, the main body configured to support the circuit assembly, the circuit assembly comprising illumination sources that emit light of different colors such that a total internal reflection is generated in the wafer;
a lens, the main body configured to provide support for the lens; and
a clamping assembly, the clamping assembly mechanically coupled to the main body such that the lens is selectively positionable with respect to a camera lens;
wherein emitted light is configured to enter the wafer from at least one side thereof, and to propagate and homogenize throughout the wafer.