US 12,379,323 B2
Optical inspection method, non-transitory storage medium storing optical inspection program, processing device, and optical inspection apparatus
Hiroshi Ohno, Tokyo (JP); Hiroya Kano, Kanagawa (JP); and Hideaki Okano, Yokohama (JP)
Assigned to Kabushiki Kaisha Toshiba, Tokyo (JP)
Filed by KABUSHIKI KAISHA TOSHIBA, Tokyo (JP)
Filed on Aug. 31, 2022, as Appl. No. 17/823,780.
Claims priority of application No. 2022-042560 (JP), filed on Mar. 17, 2022.
Prior Publication US 2023/0314335 A1, Oct. 5, 2023
Int. Cl. G01N 21/88 (2006.01); G01N 21/01 (2006.01); G01N 21/41 (2006.01)
CPC G01N 21/8851 (2013.01) [G01N 21/01 (2013.01); G01N 21/41 (2013.01); G01N 21/8806 (2013.01); G01N 2021/8845 (2013.01)] 14 Claims
OG exemplary drawing
 
1. An optical inspection method comprising:
calculating irradiation field information concerning an irradiation field on a surface of a subject when irradiating the surface of the subject with a light beam from an illumination device that is supported by a movable body and moved; and
performing path calculation processing of calculating, based on the irradiation field information, a path for the illumination device to move.