US 12,379,213 B2
Microelectromechanical gyroscope with out-of-plane detection movement
Patrick Fedeli, Senago (IT); Luca Guerinoni, Alzano Lombardo (IT); Paola Carulli, Milan (IT); and Luca Giuseppe Falorni, Limbiate (IT)
Assigned to STMICROELECTRONICS S.r.l., Agrate Brianza (IT)
Filed by STMICROELECTRONICS S.r.l., Agrate Brianza (IT)
Filed on Jan. 5, 2023, as Appl. No. 18/150,720.
Claims priority of application No. 102022000000524 (IT), filed on Jan. 14, 2022.
Prior Publication US 2023/0228570 A1, Jul. 20, 2023
Int. Cl. G01C 19/5712 (2012.01)
CPC G01C 19/5712 (2013.01) 20 Claims
OG exemplary drawing
 
1. A microelectromechanical gyroscope, comprising:
a substrate with a top surface;
a mobile mass suspended over the substrate;
first and second stator elements suspended between the mobile mass and the top surface of the substrate;
a central mechanical anchorage structure coupled to the substrate, the central anchorage structure including a first portion coupled to the substrate, the first portion being between the first and second stator elements in a first direction, the central anchorage structure including a second portion that is coupled to the first and second stator elements, the first portion being between the second portion and the substrate in a second direction that is transverse to the first direction; and
elastic elements coupling the mobile mass to the central mechanical anchorage structure.