	US 12,378,660 B2
	Pulsed laser deposition method
Heping Zeng, Chongqing (CN); Mengyun Hu, Chongqing (CN); and Yu Qiao, Chongqing (CN)
Assigned to CHONGQING HUAPU INFORMATION TECHNOLOGY CO., LTD., Chongqing (CN); CHONGQING HUAPU QUANTUM TECHNOLOGY CO., LTD., Chongqing (CN); CHONGQING HUAPU NEW ENERGY CO., LTD., Chongqing (CN); CHONGQING MENGHE BIOTECHNOLOGY CO., LTD., Chongqing (CN); YUNNAN HUAPU QUANTUM MATERIAL CO., LTD, Yunnan (CN); ROI OPTOELECTRONICS TECHNOLOGY CO, LTD., Shanghai (CN); GUANGDONG ROI OPTOELECTRONICS TECHNOLOGY CO., LTD., Guangdong (CN); CHONGQING INSTITUTE OF EAST CHINA NORMAL UNIVERSITY, Chongqing (CN); and EAST CHINA NORMAL UNIVERSITY, Shanghai (CN)
Filed by Chongqing Huapu Information Technology Co., Ltd., Chongqing (CN); Chongqing Huapu Quantum Technology Co., Ltd., Chongqing (CN); Chongqing Huapu New Energy Co., Ltd., Chongqing (CN); Chongqing Menghe Biotechnology Co., Ltd., Chongqing (CN); Yunnan Huapu quantum Material Co., Ltd, Yunnan (CN); ROI Optoelectronics Technology CO, LTD., Shanghai (CN); GuangDong ROI Optoelectronics Technology Co., Ltd., Guangdong (CN); Chongqing Institute of East China Normal University, Chongqing (CN); and East China Normal University, Shanghai (CN)
Filed on Nov. 21, 2023, as Appl. No. 18/516,292.
Claims priority of application No. 202211504194. X (CN), filed on Nov. 28, 2022.
Prior Publication US 2024/0175118 A1, May 30, 2024
Int. Cl. C23C 14/28 (2006.01); C23C 14/54 (2006.01)

CPC C23C 14/28 (2013.01) [C23C 14/542 (2013.01)]

9 Claims

1. A pulsed laser deposition method, comprising:

emitting a plurality of groups of femtosecond pulses, focusing the plurality of groups of femtosecond pulses into a plurality of groups of femtosecond filaments by lenses, and cross-coupling the plurality of groups of femtosecond filaments to form n beams of one-dimensional or two-dimensional plasma gratings, where n is a natural number greater than 1, wherein each group of femtosecond pulses comprises two or three beams of femtosecond pulses;

exciting a target material by using a first plasma grating in the n beams of one-dimensional or two-dimensional plasma gratings as a pre-pulse; and

adjusting angles of the lenses and time delay between a plurality of beams of femtosecond pulses: coupling and splicing a second plasma grating in the n beams of one-dimensional or two-dimensional plasma gratings with the first plasma grating along a grating pattern of the first plasma grating, and successively coupling and splicing a third plasma grating in the n beams of one-dimensional or two-dimensional plasma gratings with the second plasma grating along a grating pattern of the second plasma grating until a n^thplasma grating is coupled and spliced with a (n−1)^thplasma grating along a grating pattern of the (n−1)^thplasma grating to form a plasma grating channel; and exciting the target material by using the plasma grating channel to complete deposition on a substrate.