US 12,378,655 B2
Mask, mask assembly, and apparatus for manufacturing display apparatus
Daewon Baek, Yongin-si (KR); Minji Jang, Yongin-si (KR); and Jongbum Kim, Yongin-si (KR)
Assigned to Samsung Display Co., Ltd., Yongin-si (KR)
Filed by Samsung Display Co., Ltd., Yongin-si (KR)
Filed on Jan. 8, 2024, as Appl. No. 18/407,349.
Application 18/407,349 is a division of application No. 17/661,031, filed on Apr. 27, 2022, granted, now 11,871,644.
Claims priority of application No. 10-2021-0066828 (KR), filed on May 25, 2021.
Prior Publication US 2024/0164197 A1, May 16, 2024
Int. Cl. H10K 71/00 (2023.01); B05C 21/00 (2006.01); C23C 14/04 (2006.01); H10K 59/88 (2023.01)
CPC C23C 14/042 (2013.01) [B05C 21/005 (2013.01); H10K 71/00 (2023.02); H10K 59/88 (2023.02)] 4 Claims
OG exemplary drawing
 
1. A mask assembly comprising:
a mask frame including an opening; and
a mask on the mask frame and including a plurality of deposition pattern portions arranged along a first direction and a dummy pattern portion, wherein a deposition pattern portion from among the plurality of deposition pattern portions overlaps the opening, and the dummy pattern portion is outside the deposition pattern portion,
wherein the dummy pattern portion includes an auxetic structure having a negative Poisson's ratio, and is arranged between two adjacent deposition pattern portions from among the plurality of deposition pattern portions,
wherein the dummy pattern portion includes a plurality of dummy holes,
wherein the deposition pattern portions include a first deposition hole and a second deposition hole having different planar shapes from each other, and the second deposition hole is adjacent to one of the plurality of dummy holes of the dummy pattern portion in the first direction, and
wherein the second deposition hole has a shape corresponding to a shape of one of the plurality of dummy holes such that a width between the second deposition hole and the one of the plurality of dummy holes is constant in a plan view.