US 12,378,439 B2
Compositions for tungsten etching inhibition
Michael Lauter, Ludwigshafen am Rhein (DE); Haci Osman Guevenc, Ludwigshafen am Rhein (DE); Wei Lan Chiu, Taoyuan (TW); and Te Yu Wei, Taoyuan (TW)
Assigned to BASF SE, Ludwigshafen am Rhein (DE)
Appl. No. 17/632,816
Filed by BASF SE, Ludwigshafen am Rhein (DE)
PCT Filed Aug. 4, 2020, PCT No. PCT/EP2020/071925
§ 371(c)(1), (2) Date Feb. 4, 2022,
PCT Pub. No. WO2021/023748, PCT Pub. Date Feb. 11, 2021.
Claims priority of application No. 19190716 (EP), filed on Aug. 8, 2019.
Prior Publication US 2022/0267643 A1, Aug. 25, 2022
Int. Cl. C09G 1/02 (2006.01); B24B 1/00 (2006.01); B24B 37/04 (2012.01); C09G 1/00 (2006.01); C09G 1/04 (2006.01); C09G 1/06 (2006.01); C09K 3/14 (2006.01); C09K 13/06 (2006.01); C23F 11/14 (2006.01); C23F 11/173 (2006.01); H01L 21/306 (2006.01); H01L 21/321 (2006.01)
CPC C09G 1/02 (2013.01) [B24B 1/00 (2013.01); B24B 37/044 (2013.01); C09G 1/00 (2013.01); C09G 1/04 (2013.01); C09G 1/06 (2013.01); C09K 3/1454 (2013.01); C09K 3/1463 (2013.01); C09K 13/06 (2013.01); C23F 11/14 (2013.01); C23F 11/173 (2013.01); H01L 21/30625 (2013.01); H01L 21/3212 (2013.01)] 12 Claims
 
1. A composition for inhibition of tungsten etching consisting of
(A) at least one inorganic abrasive particle;
(B) at least one corrosion inhibitor selected from methylbenzethonium, methylbenzethonium salts, benzethonium and benzethonium salts, wherein the at least one corrosion inhibitor (B) is present in a concentration in the range of from ≥0.0001 wt. % to ≤0.009 wt. %, based on the total weight of the composition; and
(C) an aqueous medium, wherein the aqueous medium (C) is deionized water; and
at least one corrosion inhibitor (D) having the weight average molecular weight in the range of from >=5000 g/mol to <=50,000 g/mol, determined according to gel permeation chromatography, and
at least one oxidizing agent (E) selected from the group consisting of organic peroxides, inorganic peroxides, persulfates, iodates, potassium hydroxide, ferric nitrate, periodic acids, periodates, permanganates, perchloric acids, perchlorates, phosphoric acids, bromic acids and bromates, and
wherein the pH of the composition is in the range of from ≥6.0 to ≤8.0.