US 12,377,447 B2
Method for cleaning particulate contaminant
Jiying Shi, Chengdu (CN); and Xunyu Mao, Chengdu (CN)
Assigned to Sichuan Soarinno Technology Co., Ltd., Chengdu (CN)
Appl. No. 18/284,566
Filed by Sichuan Soarinno Technology Co., Ltd., Chengdu (CN)
PCT Filed Jun. 15, 2023, PCT No. PCT/CN2023/100348
§ 371(c)(1), (2) Date Sep. 28, 2023,
PCT Pub. No. WO2023/208255, PCT Pub. Date Nov. 2, 2023.
Claims priority of application No. 202210449342.6 (CN), filed on Apr. 26, 2022.
Prior Publication US 2025/0083198 A1, Mar. 13, 2025
Int. Cl. B08B 7/00 (2006.01); B08B 5/02 (2006.01); B08B 5/04 (2006.01); H01L 21/02 (2006.01)
CPC B08B 7/0021 (2013.01) [B08B 5/02 (2013.01); B08B 5/04 (2013.01); H01L 21/02101 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A method for cleaning particulate contaminants, comprising spraying a nitrogen-argon supercritical mixed fluid on a to-be-cleaned workpiece, wherein the nitrogen-argon supercritical mixed fluid has a temperature of −120° C. to −90° C. and a pressure of 4 to 5 Mpa;
wherein a Laval nozzle is employed to spray the nitrogen-argon supercritical mixed fluid; and
wherein a cleaning process is carried out within a sealed cleaning chamber, wherein the to-be-cleaned workpiece is placed on a placement platform inside the cleaning chamber, the Laval nozzle is located above the placement platform, and the placement platform is provided with a heating device to heat an area beneath the to-be-cleaned workpiece, such that a temperature below the to-be-cleaned workpiece is higher than a temperature over the to-be-cleaned workpiece, thereby creating a thermophoresis effect.