US 12,376,776 B1
Flexible monolithic all polycrystalline silicon carbide neural interface device and method of manufacture
Stephen Edward Saddow, Land O Lakes, FL (US); Francesco La Via, Catania (IT); and Christopher Leroy Frewin, Ann Arbor, MI (US)
Assigned to University of South Florida, Tampa, FL (US); CNR Institute for Microelectronics and Microsystems, Catania (IT); and NeuroNexus, Ann Arbor, MI (US)
Filed by University of South Florida, Tampa, FL (US)
Filed on Sep. 10, 2021, as Appl. No. 17/471,386.
Claims priority of provisional application 63/076,431, filed on Sep. 10, 2020.
Int. Cl. A61B 5/00 (2006.01); A61B 5/263 (2021.01); A61B 5/293 (2021.01); H01L 21/02 (2006.01); H01L 21/04 (2006.01); H10D 62/832 (2025.01); G06F 3/01 (2006.01)
CPC A61B 5/293 (2021.01) [A61B 5/263 (2021.01); A61B 5/6868 (2013.01); H01L 21/02167 (2013.01); H01L 21/02381 (2013.01); H01L 21/02488 (2013.01); H01L 21/02529 (2013.01); H01L 21/02576 (2013.01); H01L 21/02675 (2013.01); H01L 21/0455 (2013.01); H01L 21/0475 (2013.01); H10D 62/8325 (2025.01); A61B 2562/0209 (2013.01); A61B 2562/125 (2013.01); A61B 2562/164 (2013.01); A61B 2562/166 (2013.01); G06F 3/015 (2013.01)] 3 Claims
OG exemplary drawing
 
1. An implantable neural interface device for placement to provide neural signal transduction with a brain of a subject of interest, the device comprising:
at least one elongated probe to be placed in a brain of a subject of interest, the at least one elongated probe comprising a plurality of electrodes positioned on a surface of the elongated probe, each of the plurality of electrodes comprising:
a conductive mesa consisting of polycrystalline silicon carbide (poly-SiC);
an insulative layer consisting of amorphous SiC, the insulative layer positioned to surround the conductive mesa absent a window through the amorphous SiC exposing a surface of the conductive mesa;
a probe base integral with the elongated probe, the probe base comprising a plurality of contact pads, each of the plurality of contact pads in electrical communication with one of the plurality of electrodes; and
one or more electrical traces connecting the plurality of electrodes to the plurality of contact pads of the probe base, wherein the one or more electrical traces consist of polycrystalline SiC.