| CPC H10F 77/937 (2025.01) [H10F 10/14 (2025.01); H10F 19/80 (2025.01); H10F 19/902 (2025.01); H10F 77/122 (2025.01); H10F 77/1645 (2025.01); H10F 77/1662 (2025.01); H10F 77/215 (2025.01)] | 16 Claims |
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1. A solar cell, comprising:
a substrate;
a tunneling dielectric layer formed on the substrate;
a doped conductive layer formed on the tunneling dielectric layer, wherein the doped conductive layer has a plurality of protrusions arranged along a first direction, and each protrusion of the plurality of protrusions extends along a second direction perpendicular to the first direction;
a plurality of conductive connection structures formed at intervals along the second direction, wherein each conductive connection structure of the plurality of conductive connection structures is formed between two respective adjacent protrusions, and each conductive connection structure extends along the first direction and is directly connected with sidewalls of the two respective adjacent protrusions, and wherein in a third direction away from the substrate and perpendicular to the first direction and the second direction, a top surface of any of the plurality of conductive connection structures is lower than or flush with a top surface of a respective protrusion of the plurality of protrusions;
a passivation layer over the doped conductive layer and the plurality of conductive connection structures; and
a plurality of finger electrodes, wherein each finger electrode of the plurality of finger electrodes extends along the second direction and penetrates the passivation layer to connect to a respective protrusion of the plurality of protrusions.
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