US 12,375,080 B2
Fuse structure
Tun-Jen Chang, Hsinchu (TW); Bao-Ru Young, Hsinchu (TW); and Tung-Heng Hsieh, Hsinchu (TW)
Assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., Hsinchu (TW)
Filed by Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu (TW)
Filed on May 23, 2024, as Appl. No. 18/672,981.
Application 18/672,981 is a continuation of application No. 17/407,402, filed on Aug. 20, 2021, granted, now 11,996,837.
Prior Publication US 2024/0313770 A1, Sep. 19, 2024
Int. Cl. H03K 17/687 (2006.01); H01L 23/525 (2006.01); H10D 30/67 (2025.01); H10D 84/83 (2025.01)
CPC H03K 17/6871 (2013.01) [H01L 23/5256 (2013.01); H10D 30/6735 (2025.01); H10D 84/834 (2025.01)] 20 Claims
OG exemplary drawing
 
1. A fuse structure, comprising:
a first active region extending in a first direction and a second active region extending in the first direction, wherein a space interposes the first active region and the second active region in a second direction perpendicular to the first direction in a top view, a first epitaxial source/drain structure disposed over the first active region and a second epitaxial source/drain structure disposed over the second active region;
a first source/drain contact disposed on the first epitaxial source/drain structure and extending in the second direction having a length in the second direction greater than a width in the first direction;
a second source/drain contact disposed on the second epitaxial source/drain structure and extending in the second direction having a length in the second direction greater than a width in the first direction;
an insulator disposed laterally between each of the first and the second source/drain contacts, and extending in the first direction having a length in the first direction greater than a width in the second direction;
a dielectric fin disposed between the first active region and the second active region, wherein the insulator is disposed on the dielectric fin;
a source/drain contact via disposed on the first source/drain contact, the source/drain contact being disposed in the space in the top view; and
a program line connected to the source/drain contact via.