US 12,374,869 B2
Static eliminator and ion balance control method
Saeyoung Yang, Osaka (JP)
Assigned to KEYENCE CORPORATION, Osaka (JP)
Filed by Keyence Corporation, Osaka (JP)
Filed on Aug. 4, 2023, as Appl. No. 18/230,223.
Claims priority of application No. 2022-142588 (JP), filed on Sep. 7, 2022.
Prior Publication US 2024/0079857 A1, Mar. 7, 2024
Int. Cl. H01T 23/00 (2006.01); H01T 19/04 (2006.01)
CPC H01T 23/00 (2013.01) [H01T 19/04 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A static eliminator that releases ions to an object to eliminate static electricity of the object, the static eliminator comprising:
an ion generator that generates a corona discharge in response to application of a positive polarity high voltage to generate positive ions, and generates a corona discharge in response to application of a negative polarity high voltage to generate negative ions;
a high voltage application unit that applies the positive polarity high voltage and the negative polarity high voltage to the ion generator;
a ground electrode short-circuited to an earth;
a first detection circuit that detects a first ion current flowing between the earth and the static eliminator via the ground electrode;
a detection electrode different from the ground electrode, the detection electrode being arranged at a position where the positive ions and the negative ions generated by the ion generator arrive;
a second detection circuit that detects a second ion current generated by the positive ions and the negative ions arriving at the detection electrode; and
a feedback control unit that executes feedback control on the high voltage application unit to make the first ion current detected by the first detection circuit be a first target value, and executes feedback control on the high voltage application unit to make the second ion current detected by the second detection circuit be a second target value.