US 12,374,482 B2
Carrier chuck comprising a plurality of magnets and methods of forming and using thereof
Yosef Kornbluth, Phoenix, AZ (US); Whitney Bryks, Tempe, AZ (US); Ravindranadh Eluri, Tempe, AZ (US); Aaditya Anand Candadai, Chandler, AZ (US); and Srinivas Pietambaram, Chandler, AZ (US)
Assigned to Intel Corporation, Santa Clara, CA (US)
Filed by Intel Corporation, Santa Clara, CA (US)
Filed on Nov. 30, 2022, as Appl. No. 18/059,992.
Prior Publication US 2024/0177907 A1, May 30, 2024
Int. Cl. H01F 7/20 (2006.01); B32B 3/18 (2006.01); B32B 3/30 (2006.01); B32B 15/18 (2006.01); B32B 17/06 (2006.01)
CPC H01F 7/206 (2013.01) [B32B 3/18 (2013.01); B32B 3/30 (2013.01); B32B 15/18 (2013.01); B32B 17/06 (2013.01); B32B 2307/208 (2013.01)] 4 Claims
OG exemplary drawing
 
1. A carrier chuck comprising:
a base plate with a top surface;
a plurality of first magnets positioned in a first region of the top surface, the plurality of first magnets configured to produce a first electromagnetic field to retain or suspend a panel placed on the carrier chuck during panel processing, wherein the plurality of first magnets correspond to a first zone on a periphery of the panel; and
a plurality of second magnets positioned in a second region of the top surface, the plurality of second magnets configured to produce a second electromagnetic field to retain or suspend the panel placed on the carrier chuck during panel processing, wherein the second region corresponds to a second zone on a center of the panel; and
wherein the first and second regions correspond to regions of the panel which comprise a magnetic material; and
wherein the first electromagnetic field is different from the second electromagnetic field; and
wherein the first electromagnetic field is configured to suspend the first zone of the panel at a first height and the second electromagnetic field is configured to suspend the second zone of the panel at a second height, wherein the first height and the second height are substantially the same height.