US 12,371,799 B2
Acidic treatment liquid processing apparatus, acidic treatment liquid processing method, surface treatment system, and surface treatment method
Koji Imasaka, Tokyo (JP); Hiroaki Mikawa, Tokyo (JP); Kohei Kawasaki, Tokyo (JP); Mitsuhiro Ishigaki, Tokyo (JP); Masahiko Nagai, Tokyo (JP); Hidehiko Tajima, Tokyo (JP); Ayako Ureshino, Tokyo (JP); Kaoru Egawa, Tokyo (JP); Akihiro Sakanishi, Tokyo (JP); and Taisuke Miyazaki, Tokyo (JP)
Assigned to MITSUBISHI HEAVY INDUSTRIES, LTD., Tokyo (JP)
Appl. No. 17/284,522
Filed by MITSUBISHI HEAVY INDUSTRIES, LTD., Tokyo (JP)
PCT Filed Aug. 26, 2019, PCT No. PCT/JP2019/033350
§ 371(c)(1), (2) Date Apr. 12, 2021,
PCT Pub. No. WO2020/090204, PCT Pub. Date May 7, 2020.
Claims priority of application No. 2018-205461 (JP), filed on Oct. 31, 2018.
Prior Publication US 2021/0339199 A1, Nov. 4, 2021
Int. Cl. C23G 1/36 (2006.01); B01D 61/44 (2006.01); B01D 61/54 (2006.01); C02F 1/469 (2023.01); C23C 22/24 (2006.01); C23C 22/86 (2006.01); C23G 1/12 (2006.01)
CPC C23G 1/36 (2013.01) [B01D 61/44 (2013.01); B01D 61/54 (2013.01); C23C 22/24 (2013.01); C23C 22/86 (2013.01); C23G 1/125 (2013.01); B01D 61/445 (2013.01); B01D 2311/24 (2013.01); B01D 2311/252 (2022.08); B01D 2311/2532 (2022.08); B01D 2311/2623 (2013.01); B01D 2311/2684 (2013.01); B01D 2313/32 (2013.01); B01D 2313/345 (2013.01); B01D 2317/08 (2013.01); C02F 1/4693 (2013.01)] 8 Claims
OG exemplary drawing
 
1. An acidic treatment liquid processing method, comprising:
passing an acidic treatment liquid containing a dichromate ion and a metal cation into a first chamber separated from a second chamber by a diaphragm permeable to a metal cation, and passing an acid aqueous solution into the second chamber;
applying a voltage while using a first electrode disposed in the first chamber as an anode and a second electrode disposed in the second chamber as a cathode to move a metal cation in the acidic treatment liquid to the acid aqueous solution through the diaphragm; and
measuring, during applying a voltage to the first electrode and the second electrode, a temperature of the acidic solution in the second chamber using a sensor,
wherein, in response to a determination that the diaphragm breaks based on a measurement result of the sensor, the applying of the voltage and the passing of the acidic treatment liquid are stopped.