US 12,371,384 B2
Integrated polymer-derived ceramic thin-film sensor produced by laser pyrolysis and additive manufacturing and fabrication method thereof
Daoheng Sun, Xiamen (CN); Zhenyin Hai, Xiamen (CN); Lida Xu, Xiamen (CN); Lanlan Li, Xiamen (CN); Zaifu Cui, Xiamen (CN); Chao Wu, Xiamen (CN); Guochun Chen, Xiamen (CN); Xin Li, Xiamen (CN); Qinnan Chen, Xiamen (CN); and Gonghan He, Xiamen (CN)
Assigned to XIAMEN UNIVERSITY, Xiamen (CN)
Filed by XIAMEN UNIVERSITY, Xiamen (CN)
Filed on Dec. 8, 2022, as Appl. No. 18/063,662.
Claims priority of application No. 202111524535.5 (CN), filed on Dec. 14, 2021.
Prior Publication US 2023/0183138 A1, Jun. 15, 2023
Int. Cl. C04B 35/524 (2006.01); B33Y 10/00 (2015.01); B33Y 70/00 (2020.01); B33Y 80/00 (2015.01); C04B 35/626 (2006.01); C04B 41/00 (2006.01); C04B 41/45 (2006.01); G01L 1/00 (2006.01)
CPC C04B 35/524 (2013.01) [C04B 35/6267 (2013.01); C04B 41/0036 (2013.01); C04B 41/0072 (2013.01); C04B 41/4535 (2013.01); C04B 41/4554 (2013.01); C04B 41/4572 (2013.01); G01L 1/005 (2013.01); B33Y 10/00 (2014.12); B33Y 70/00 (2014.12); B33Y 80/00 (2014.12); C04B 2235/665 (2013.01)] 8 Claims
OG exemplary drawing
 
1. An integrated polymer-derived ceramic (PDC) thin-film sensor produced by laser pyrolysis and additive manufacturing, wherein the sensor comprises a base and a sensitive grid, the sensitive grid is in situ fabricated on the base through the laser pyrolysis, and the sensitive grid is composed of a PDC-doped conductive filler;
a thickness of the sensitive grid ranges between 10-20 μm;
wherein a fabrication method of the sensor comprises the following steps:
preparing a mixed solution of a conductive filler and a PDC solution, and writing the mixed solution directly on the base through a Weissenberg direct writing process, after heating and solidifying, performing a laser treatment at the same temperature to obtain the integrated PDC thin-film sensor.