US 12,368,427 B2
Bulk acoustic wave resonators with patterned mass loading layers
Kwang Jae Shin, Yongin (KR); Jiansong Liu, Fremont, CA (US); Jong Duk Han, Yongin (KR); Jae Hyung Lee, Seoul (KR); Yiliu Wang, Irvine, CA (US); Yosuke Hamaoka, Suita (JP); Alexandre Augusto Shirakawa, Cardiff by the Sea, CA (US); and Benfeng Zhang, Moriguchi (JP)
Assigned to Skyworks Global Pte. Ltd., Singapore (SG)
Filed by Skyworks Global Pte. Ltd., Singapore (SG)
Filed on Mar. 12, 2024, as Appl. No. 18/603,059.
Application 18/603,059 is a continuation of application No. 17/218,725, filed on Mar. 31, 2021, granted, now 12,021,506.
Claims priority of provisional application 63/085,413, filed on Sep. 30, 2020.
Claims priority of provisional application 63/085,399, filed on Sep. 30, 2020.
Claims priority of provisional application 63/085,398, filed on Sep. 30, 2020.
Prior Publication US 2024/0297635 A1, Sep. 5, 2024
Int. Cl. H03H 9/205 (2006.01); H03H 3/02 (2006.01); H03H 3/04 (2006.01); H03H 9/02 (2006.01); H03H 9/17 (2006.01); H03H 9/54 (2006.01); H03H 9/56 (2006.01); H04B 1/40 (2015.01)
CPC H03H 3/04 (2013.01) [H03H 3/02 (2013.01); H03H 9/02015 (2013.01); H03H 9/02086 (2013.01); H03H 9/173 (2013.01); H03H 9/175 (2013.01); H03H 9/205 (2013.01); H03H 9/54 (2013.01); H03H 9/564 (2013.01); H03H 9/568 (2013.01); H04B 1/40 (2013.01); H03H 2003/0442 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An acoustic wave filter comprising:
a first bulk acoustic wave resonator having a first main acoustically active region and a first frame region, the first bulk acoustic wave resonator including a first patterned mass loading layer having a first duty factor in the first main acoustically active region and a first raised frame structure in the first frame region;
a second bulk acoustic wave resonator having a second main acoustically active region and a second frame region, the second bulk acoustic wave resonator including a second patterned mass loading layer having a second duty factor in the second main acoustically active region and a second raised frame structure in the second frame region, the second duty factor being different than the first duty factor; and
a plurality of additional acoustic wave resonators, the first bulk acoustic wave resonator, the second bulk acoustic wave resonator, and the plurality of additional acoustic wave resonators together configured to filter a radio frequency signal.