US 12,366,707 B2
Graded-index polymer waveguide and manufacturing method thereof
Xiaofeng Liu, Shenzhen (CN); Guodong Wang, Shenzhen (CN); Hua Miao, Shenzhen (CN); Tengfei Yao, Shenzhen (CN); Rui Wang, Shenzhen (CN); and Yongkai Li, Shenzhen (CN)
Assigned to SHENNAN CIRCUITS CO., LTD., Shenzhen (CN)
Filed by SHENNAN CIRCUITS CO., LTD., Shenzhen (CN)
Filed on Oct. 31, 2022, as Appl. No. 18/051,493.
Application 18/051,493 is a continuation of application No. PCT/CN2020/132463, filed on Nov. 27, 2020.
Prior Publication US 2023/0084877 A1, Mar. 16, 2023
Int. Cl. G02B 6/13 (2006.01); G02B 6/122 (2006.01); G02B 6/124 (2006.01)
CPC G02B 6/1221 (2013.01) [G02B 6/124 (2013.01); G02B 6/13 (2013.01)] 11 Claims
 
1. A manufacturing method of a graded-index polymer waveguide, comprising:
providing a waveguide substrate;
manufacturing a waveguide lower cladding layer on a surface of the waveguide substrate;
coating a material of a waveguide core layer having UV photosensitivity on a surface of the waveguide lower cladding layer away from the waveguide substrate;
performing a hot imprinting process for the material of the waveguide core layer by means of a flexible transfer film mold and forming the waveguide core layer having an imprinted waveguide link structure;
performing a heat treatment process for the waveguide core layer having the imprinted waveguide link structure, wherein morphology of a top surface of the waveguide core layer turns to a circular structure;
performing a pre-exposure process for the waveguide core layer after being performed the heat treatment process;
coating a waveguide upper cladding layer on a surface of the waveguide core layer after being performed the pre-exposure process; and
curing the waveguide core layer and the waveguide upper cladding layer.