US 12,366,239 B2
Pump, apparatus for supplying chemical liquid and apparatus for processing substrate
Young Jun Son, Chungcheongnam-do (KR); Woo Sin Jung, Chungcheongnam-do (KR); Woo Ram Lee, Chungcheongnam-do (KR); Byoung Doo Choi, Chungcheongnam-do (KR); and Sung Chul Jung, Chungcheongnam-do (KR)
Assigned to SEMES CO., LTD., Chungcheongnam-do (KR)
Filed by SEMES CO., LTD., Chungcheongnam-do (KR)
Filed on Feb. 5, 2023, as Appl. No. 18/105,878.
Claims priority of application No. 10-2022-0041968 (KR), filed on Apr. 5, 2022.
Prior Publication US 2023/0313791 A1, Oct. 5, 2023
Int. Cl. F04B 43/10 (2006.01); B05B 9/04 (2006.01); F04B 43/00 (2006.01)
CPC F04B 43/10 (2013.01) [B05B 9/0406 (2013.01); F04B 43/0072 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A pump, comprising:
a tube having elasticity and having a flow path through which a chemical liquid flows in, wherein the tube has a toroid shape having central portions inwardly recessed toward the flow path and peripheral ring portions circularly surrounding the central portions and outwardly protruding away from the flow path; and
a case having an internal space partitioned into at least two chambers through which gas is supplied or discharged, where the at least two chambers cover an outer circumference of the tube.