US 12,041,788 B2
Storage device and method for manufacturing storage device
Tsutomu Nakanishi, Kanagawa (JP); Yasuaki Ootera, Kanagawa (JP); Nobuyuki Umetsu, Kanagawa (JP); Michael Arnaud Quinsat, Kanagawa (JP); Masaki Kado, Kanagawa (JP); Susumu Hashimoto, Tokyo (JP); Shiho Nakamura, Kanagawa (JP); Naoharu Shimomura, Tokyo (JP); Tsuyoshi Kondo, Kanagawa (JP); and Mutsumi Okajima, Mie (JP)
Assigned to Kioxia Corporation, Tokyo (JP)
Filed by Kioxia Corporation, Tokyo (JP)
Filed on Sep. 3, 2021, as Appl. No. 17/467,095.
Claims priority of application No. 2021-044935 (JP), filed on Mar. 18, 2021.
Prior Publication US 2022/0302208 A1, Sep. 22, 2022
Int. Cl. H10B 61/00 (2023.01); H10N 50/01 (2023.01); H10N 50/10 (2023.01); H10N 50/80 (2023.01)
CPC H10B 61/22 (2023.02) [H10N 50/01 (2023.02); H10N 50/10 (2023.02); H10N 50/80 (2023.02)] 16 Claims
OG exemplary drawing
 
1. A storage device, comprising:
an insulating layer including a first surface, a second surface, a first insulating region provided between the first and second surfaces, and a second insulating region provided between the first and second surfaces;
at least one memory unit provided in the first insulating region;
at least one first pillar provided in the second insulating region and extending in a first direction intersecting the first and second surfaces;
a first element provided adjacent to the first surface of the insulating layer; and
a second element provided adjacent to the second surface of the insulating layer,
wherein the at least one first pillar includes:
a first region including a first portion, a second portion and a third portion, the first portion having a first maximum diameter, the second portion having a second maximum diameter, the third portion being provided between the first and second portions in the first direction, the third portion being provided on each of the first and second portions in the first direction, the third portion having a first minimum diameter, the first region continuously decreasing in diameter from the first portion to the third portion, the first region continuously decreasing in diameter from the second portion to the third portion, and the first and second portions defining a first distance therebetween in the first direction;
a second region including a fourth portion, a fifth portion and a sixth portion, the fourth portion having a third maximum diameter, the fifth portion having a fourth maximum diameter, the sixth portion being provided between the fourth and fifth portions in the first direction, the sixth portion being provided on to each of the fourth and fifth portions in the first direction, the sixth portion having a second minimum diameter, the second region continuously decreasing in diameter from the fourth portion to the sixth portion, the second region continuously decreasing in diameter from the fifth portion to the sixth portion, and the fourth and fifth portions defining a second distance therebetween in the first direction; and
a third region provided between the first and second regions in the first direction and including a seventh portion, an eighth portion and a ninth portion, the seventh portion having a fifth maximum diameter, the eighth portion having a sixth maximum diameter, the ninth portion being provided between the seventh and eighth portions in the first direction, the ninth portion being provided on each of the seventh and eighth portions in the first direction, the ninth portion having a third minimum diameter, the third region continuously decreasing in diameter from the seventh portion to the ninth portion, the third region continuously decreasing in diameter from the eighth portion to the ninth portion, the seventh and eighth portions defining a third distance therebetween in the first direction, and the third distance being shorter than each of the first and second distances.